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Published in 2021 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2021.3074822
Abstract: In this paper we introduce the concept, modelling and analysis of triangular and sinusoidal springs intended for large in-plane translational displacements for MEMS-guiding applications. The proposed spring systems combine the advantages of minimal space requirement,…
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Keywords:
highly selective;
large displacements;
displacements surface;
selective guiding ... See more keywords