Experimental Study and Modeling of Silicon Supersaturated with Selenium by Ion Implantation and Nanosecond-Laser Melting
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DOI: 10.12693/aphyspola.136.254
Abstract: Experimental Study and Modeling of Silicon Supersaturated with Selenium by Ion Implantation and Nanosecond-Laser Melting F.F. Komarova,∗, G. Ivlev, G. Zayats, A. Komarov, N. Nechaev, I. Parkhomenko, L. Vlasukova, E. Wendler and S. Miskiewicz A.N.… read more here.
Keywords: experimental study; supersaturated selenium; selenium ion; modeling silicon ... See more keywords