A Thermoelectric MEMS Microwave Power Sensor with Inline Self-Detection Function
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13020239
Abstract: In this paper, the design, fabrication and measurement of a thermoelectric MEMS microwave power sensor with the terminal load inline self-detection function is proposed. The structure of the sensor mainly includes a coplanar waveguide, a… read more here.
Keywords: power; self detection; detection function; sensor ... See more keywords