The role of thermal processes and target evaporation in formation of self-sputtering mode for copper magnetron sputtering
Sign Up to like & getrecommendations! Published in 2018 at "Vacuum"
DOI: 10.1016/j.vacuum.2018.03.020
Abstract: Abstract The main focus of the article is the study of function mechanisms of a magnetron sputtering system (MSS) with a heat-insulated metal target in a self-sputtering gasless mode. A distinctive feature of the studied… read more here.
Keywords: magnetron sputtering; target evaporation; self sputtering; target ... See more keywords
Impact of self-sputtering in high power impulse magnetron sputtering (HiPIMS) with helium
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DOI: 10.1063/5.0145547
Abstract: Conventional magnetron discharge is a widely used technology for many applications. In the last decade, the high current density sputtering regime has been an interesting alternative for tailoring thin film properties. In this paper, we… read more here.
Keywords: impulse magnetron; power impulse; magnetron; high power ... See more keywords
Calculation of Self-Sputtering Yield under Ion Bombardment of Solids: Computer Simulation and Theory
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DOI: 10.1134/s1063784218100225
Abstract: We developed a computer simulation program for investigation of solid self-sputtering under ion bombardment. The program is based on binary collision approximation, truncated Coulomb potential, and the model of local inelastic losses proportional to energy.… read more here.
Keywords: computer simulation; sputtering yield; self sputtering; ion bombardment ... See more keywords