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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13030437
Abstract: Mode-localized sensing paradigms applied to accelerometers have recently become popular research subjects. However, the output of mode-localized accelerometers is influenced by environment temperature due to the difference in the thermal properties of the coupling resonators…
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Keywords:
localized accelerometers;
temperature compensation;
temperature;
mode localized ... See more keywords