Advanced Hybrid Positioning System of SEM and AFM for 2D Material Surface Metrology
Sign Up to like & getrecommendations! Published in 2022 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927622000903
Abstract: Abstract As the measurement scale shrinks, the reliability of nanoscale measurement is even more crucial for a variety of applications, including semiconductor electronics, optical metamaterials, and sensors. Specifically, it is difficult to measure the nanoscale… read more here.
Keywords: positioning system; sem afm; advanced hybrid; hybrid positioning ... See more keywords