Robust surface reconstruction by design-guided SEM photometric stereo
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DOI: 10.1088/1361-6501/aa5c45
Abstract: We present a novel approach that addresses the blind reconstruction problem in scanning electron microscope (SEM) photometric stereo for complicated semiconductor patterns to be measured. In our previous work, we developed a bootstrapping de-shadowing and… read more here.
Keywords: reconstruction; photometric stereo; surface reconstruction; sem photometric ... See more keywords