New approaches to in-situ heating in FIB/SEM systems
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DOI: 10.1017/s143192761700530x
Abstract: Over last decades significant effort has been made on in-situ heating experiments inside SEM and FIB/SEM chambers. Traditional way is to use low vacuum environment in the entire chamber. Although this valuable approach brings various… read more here.
Keywords: situ heating; fib sem; heating fib; vacuum ... See more keywords