The Challenges of High-Resolution Analytic FIB-SEM Tomography and Their Solution
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DOI: 10.1017/s1431927618004555
Abstract: A FIB-SEM offers access to elemental and structural site-specific information at the nano-scale by the means of FIB-SEM tomography. However, as valuable as the obtainable data is, as much care has to be taken during… read more here.
Keywords: sem; sem tomography; challenges high; fib sem ... See more keywords
A Fast and Accurate Workflow for Analytic 3D FIB-SEM Tomography
Sign Up to like & getrecommendations! Published in 2019 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927619005324
Abstract: The integration of energy dispersive spectrometry (EDS) and electron backscattered diffraction (EBSD) on a scanning electron microscope (SEM) are routine methods of material analysis. EDS offers chemical quantification and element spatial distribution in the form… read more here.
Keywords: fib sem; fast accurate; workflow analytic; analytic fib ... See more keywords