Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement
Sign Up to like & getrecommendations! Published in 2017 at "International Journal of Production Research"
DOI: 10.1080/00207543.2015.1109153
Abstract: With the shrinking feature size of integrated circuits driven by continuous technology migrations for wafer fabrication, the control of tightening critical dimensions is critical for yield enhancement, while physical failure analysis is increasingly difficult. In… read more here.
Keywords: big data; analysing semiconductor; semiconductor manufacturing; root ... See more keywords
Rule based workload control in semiconductor manufacturing revisited
Sign Up to like & getrecommendations! Published in 2020 at "International Journal of Production Research"
DOI: 10.1080/00207543.2020.1797208
Abstract: An essential task in manufacturing planning and control is to determine when to release orders to the shop floor. A prominent approach is the workload control (WLC) concept which originated from the idea of controlling… read more here.
Keywords: semiconductor manufacturing; rule; workload control; rule based ... See more keywords
The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Access"
DOI: 10.1109/access.2021.3103235
Abstract: Virtual metrology (VM) is an enabling technology capable of performing virtual inspection on the metrology quality of wafers. Instead of physically acquiring the metrology measurements, VM applies conjecture models on the process data of wafers… read more here.
Keywords: system; metrology; sampling scheme; smart sampling ... See more keywords
Just-In-Time Modeling With Variable Shrinkage Based on Gaussian Processes for Semiconductor Manufacturing
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2018.2826012
Abstract: Virtual metrology (VM) is often applied in semiconductor manufacturing when process measurements cannot be obtained without delay or without impacting the cycle time. When the process condition is varying, the modeling results can be inaccurate… read more here.
Keywords: semiconductor manufacturing; semiconductor; time; process ... See more keywords
Practical Routing Algorithm Using a Congestion Monitoring System in Semiconductor Manufacturing
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2018.2858013
Abstract: Automated material handling systems (AMHSs) used in semiconductor fabrication are sophisticated and integrated control systems that transfer materials from one machine to another within a manufacturing facility via hundreds of vehicles. Vehicular congestion in AMHSs… read more here.
Keywords: monitoring system; semiconductor manufacturing; congestion monitoring; routing algorithm ... See more keywords
A Voting Ensemble Classifier for Wafer Map Defect Patterns Identification in Semiconductor Manufacturing
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2019.2904306
Abstract: A wafer map contains a graphical representation of the locations about defect pattern on the semiconductor wafer, which can provide useful information for quality engineers. Various defect patterns occur due to increasing wafer sizes and… read more here.
Keywords: semiconductor; wafer; wafer map; voting ensemble ... See more keywords
Guest Editorial Special Section on the 2019 SEMI Advanced Semiconductor Manufacturing Conference
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2020.3010607
Abstract: Dear readers—We hope this editorial finds you and your family safe as we and the world battle—or, hopefully at the time of this publication, recover from—perhaps the greatest world-wide health crisis in the last century,… read more here.
Keywords: special section; guest editorial; semiconductor manufacturing; semiconductor ... See more keywords
Practical Queueing Models for Preventive Maintenance Plan Optimization: Multiple Maintenance Types and Numerical Studies
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2020.3041789
Abstract: Preventive Maintenance (PM) activities in semiconductor manufacturing are important for equipment availability and reliability. Since PMs are down events that remove a tool from service, when to conduct a PM and how to group multiple… read more here.
Keywords: time; preventive maintenance; maintenance; mean cycle ... See more keywords
Simulation Study for Semiconductor Manufacturing System: Dispatching Policies for a Wafer Test Facility
Sign Up to like & getrecommendations! Published in 2019 at "Sustainability"
DOI: 10.3390/su11041119
Abstract: The manufacture of semiconductor products requires many dedicated steps, and these steps can be grouped into several major phases. One of the major steps found at the end of the wafer fabrication process is the… read more here.
Keywords: system; dispatching policies; facility; test facility ... See more keywords