A method for wafer assignment in semiconductor wafer fabrication considering both quality and productivity perspectives
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Manufacturing Systems"
DOI: 10.1016/j.jmsy.2019.05.006
Abstract: Abstract In the semiconductor wafer fabrication process, wafers go through a series of sequential process steps. Typically, each process step has several machines, and the wafers are assigned to one whenever they enter the process… read more here.
Keywords: productivity perspectives; semiconductor; wafer fabrication; productivity ... See more keywords
Scheduling Semiconductor Wafer Fabrication Using a New Fuzzy Association Classification Rules Based on Dynamic Fuzzy Partition
Sign Up to like & getrecommendations! Published in 2017 at "Chinese Journal of Electronics"
DOI: 10.1049/cje.2016.11.006
Abstract: This paper proposes a dynamic fuzzy partition method of attribute domain suitable for the scheduling problem of Semiconductor wafer fabrication (SWF). Then, based on the above partition method, this paper gives a new Fuzzy association… read more here.
Keywords: fuzzy partition; semiconductor wafer; wafer fabrication; partition ... See more keywords