Features of Our SEM Transmission Diffraction Sub-stage with 6-axis Sample Control and a Camera with Variable Camera Length
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DOI: 10.1017/s1431927620019789
Abstract: With the development of fast electron sensitive cameras, a wide range of diffraction-based techniques has recently been developed for 4D-STEM [1], many of these techniques can also be employed in conventional SEMs and FIB/SEMs by… read more here.
Keywords: sems fib; sub stage; camera; diffraction ... See more keywords