Articles with "sensing mems" as a keyword



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Dynamics and vibrations of particle-sensing MEMS considering thermal and electrostatic actuation

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Published in 2018 at "Microsystem Technologies"

DOI: 10.1007/s00542-017-3554-y

Abstract: The dynamic behavior of micro-cantilevers and micro-bridges under electrostatic and thermal base actuations is investigated in this paper. To solve the equation of motion for the systems, a finite element model is presented and numerical solutions… read more here.

Keywords: mems considering; particle sensing; dynamics vibrations; considering thermal ... See more keywords