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Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3554-y
Abstract: The dynamic behavior of micro-cantilevers and micro-bridges under electrostatic and thermal base actuations is investigated in this paper. To solve the equation of motion for the systems, a finite element model is presented and numerical solutions…
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Keywords:
mems considering;
particle sensing;
dynamics vibrations;
considering thermal ... See more keywords