Calibration-based overlay sensing with minimal-footprint targets
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DOI: 10.1063/5.0058307
Abstract: Tom A. W. Wolterink, Robin D. Buijs, Giampiero Gerini, 3 Ewold Verhagen, and A. Femius Koenderink a) Center for Nanophotonics, AMOLF, Science Park 104, 1098XG Amsterdam, The Netherlands Optics Department, Netherlands Organization for Applied Scientific… read more here.
Keywords: sensing minimal; footprint targets; minimal footprint; based overlay ... See more keywords