A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring
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DOI: 10.3390/mi14030654
Abstract: In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline leaks. The proposed MEMS Hydrophone consists of a piezoelectric micromachined ultrasonic transducer (PMUT) array, an… read more here.
Keywords: aln based; high sensitivity; sensitivity aln; pipeline ... See more keywords