Silicon nanostructure-based photonic MEMS sensor for biosensing application
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DOI: 10.1117/1.jnp.15.026001
Abstract: Abstract. We explored the design of an optical pressure sensor. The objective is to create a photonic microelectromechanical system-based cantilever sensor design to detect prostate-specific antigen, a protein biomarker associated with prostate cancer. Sensor’s performance… read more here.
Keywords: sensitivity mpa; shaped microcantilever; sensitivity; silicon nanostructure ... See more keywords