200 mm sensor development using bonded wafers
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DOI: 10.1088/1748-0221/16/02/t02002
Abstract: Sensors fabricated from high resistivity, float zone, silicon material have been the basis of vertex detectors and trackers for the last 30 years. The areas of these devices have increased from a few square cm… read more here.
Keywords: development using; development; 200 sensor; using bonded ... See more keywords