Nanoforest-based SERS sensor fabricated using a maskless process for detecting chemical and pathogen
Sign Up to like & getrecommendations! Published in 2019 at "Microsystem Technologies"
DOI: 10.1007/s00542-019-04335-0
Abstract: Nanoscale silicon forest-based surface enhanced Raman spectroscopy (SERS) sensor was fabricated using a simple maskless Bosch process method. Silicon nanoforest was further coated with gold and grafted with silver-plate nanoparticles. Fabricated SERS sensor was then… read more here.
Keywords: fabricated using; process; sers sensor; based sers ... See more keywords