Fully Integrated Bidirectional CMOS-MEMS Flow Sensor With Low Power Pulse Operation
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DOI: 10.1109/jsen.2019.2891784
Abstract: Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas flow. Our SoC features a very low-noise instrumentation amplifier… read more here.
Keywords: flow sensor; mems flow; cmos mems; low power ... See more keywords