Sensitive, small, broadband and scalable optomechanical ultrasound sensor in silicon photonics
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DOI: 10.1038/s41566-021-00776-0
Abstract: Ultrasonography1 and photoacoustic2,3 (optoacoustic) tomography have recently seen great advances in hardware and algorithms. However, current high-end systems still use a matrix of piezoelectric sensor elements, and new applications require sensors with high sensitivity, broadband… read more here.
Keywords: photonics; ultrasound sensor; sensor; sensor silicon ... See more keywords