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Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-3712-x
Abstract: In this study, high-density carbon nanotubes (CNTs) are grown on an oxidized Si substrate by thermal chemical vapor deposition (CVD). CNTs were synthesized by thermal CVD at 700 °C in a C2H2 atmosphere and used to…
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Keywords:
carbon;
gas sensors;
carbon nanotubes;
sensors decorated ... See more keywords