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Published in 2017 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2017.2710354
Abstract: Microelectromechanical systems sensors have been intensively developed utilizing various physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among these sensing concepts, the thermoresistive effect is of interest for a wide range of thermal sensors…
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Keywords:
thermoresistive effect;
effect advanced;
sensors fundamentals;
effect ... See more keywords