Double-Diffracted Spatially Separated Heterodyne Grating Interferometer and Analysis on its Alignment Tolerance
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DOI: 10.3390/app9020263
Abstract: An optical configuration of double-diffracted spatially separated heterodyne grating interferometer with a mechanical fixture was designed. To further investigate its features and provide robust measurements, the alignment tolerance in double-diffracted spatially separated heterodyne grating interferometer… read more here.
Keywords: spatially separated; double diffracted; heterodyne grating; separated heterodyne ... See more keywords