Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process
Sign Up to like & getrecommendations! Published in 2017 at "Micromachines"
DOI: 10.3390/mi8020051
Abstract: Multi-vibrational-mode electrostatic energy harvesters are designed and micro-machined utilizing a simple silicon-on-insulator (SOI) wafer-based process. Enhanced adaptability to various vibrational environments is achieved in the proposed design by using serpentine springs attached to the fishbone-shaped… read more here.
Keywords: serpentine springs; development mems; process; electrostatic energy ... See more keywords