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Published in 2023 at "Review of Scientific Instruments"
DOI: 10.1063/5.0147016
Abstract: Dispersion forces start to play role in modern micro/nanoelectromechanical devices, but the methods to measure these forces at distances close to contact ([Formula: see text] nm) suffer from pull-in instability. The method of adhered cantilever…
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Keywords:
experimental setup;
setup measuring;
dispersion;
adhered cantilever ... See more keywords