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   Articles with "shallow trench" as a keyword



Quantitative Electron Energy Loss Spectroscopy (EELS) Analysis of Flowable CVD Oxide for Shallow Trench Isolation of finFET Integration

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recommendations! Published in 2017 at "Microscopy and Microanalysis"

DOI: 10.1017/s1431927617007978

Abstract: Non-planar semiconductor devices, such asvertical f in-based field-effect transistor (finFET) device, h ave become a viable technology for 22nm node and beyond [1-4]. However, finFET device fabrication faces new challenges and process variation control become… read more here.

Keywords: integration; shallow trench; finfet; spectroscopy ... See more keywords

An Easy-to-Fabricate Microfluidic Shallow Trench Induced Three-Dimensional Cell Culturing and Imaging (STICI3D) Platform

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recommendations! Published in 2022 at "ACS Omega"

DOI: 10.1021/acsomega.1c05118

Abstract: Compared to the established monolayer approach of two-dimensional cell cultures, three-dimensional (3D) cultures more closely resemble in vivo models; that is, the cells interact and form clusters mimicking their organization in native tissue. Therefore, the… read more here.

Keywords: cell; easy fabricate; design; shallow trench ... See more keywords

GaN-based shallow-trench vertical Hall devices

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recommendations! Published in 2025 at "Applied Physics Letters"

DOI: 10.1063/5.0250222

Abstract: In this Letter, a GaN-based vertical Hall device is designed and experimentally fabricated, offering an effective solution for in-plane magnetic field detection. By introducing a shallow trench structure between the excitation and sensing electrodes, the… read more here.

Keywords: hall; vertical hall; gan based; device ... See more keywords

Radiation Hardening by the Modification of Shallow Trench Isolation Process in Partially Depleted SOI MOSFETs

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recommendations! Published in 2018 at "IEEE Transactions on Nuclear Science"

DOI: 10.1109/tns.2018.2798295

Abstract: Two radiation hardening processes for shallow trench isolation (STI), i.e., Si+ implantation and STI oxide nitridation are investigated, including the impact on nominal electrical characteristics and radiation hardness. The total ionizing dose effects of the… read more here.

Keywords: radiation hardening; process; shallow trench; trench isolation ... See more keywords

Radiation-Induced Charge Trapping in Shallow Trench Isolations of FinFETs

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recommendations! Published in 2024 at "IEEE Transactions on Nuclear Science"

DOI: 10.1109/tns.2023.3326481

Abstract: We provide comprehensive experimental data and technology computer-aided design (TCAD) simulations to clarify total-ionizing-dose mechanisms in 16-nm Si FinFETs. In n-channel FinFETs irradiated to ultrahigh doses, the transconductance evolution rebounds (increase up to 3–10 Mrad… read more here.

Keywords: sti; charge trapping; radiation induced; shallow trench ... See more keywords