Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
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DOI: 10.3390/mi12060622
Abstract: The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation… read more here.
Keywords: error; model; shaped electro; electro thermal ... See more keywords