Spectrally-shaped illumination for improved optical inspection of lateral III-V-semiconductor oxidation.
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DOI: 10.1364/oe.480753
Abstract: We report an hyperspectral imaging microscopy system based on a spectrally-shaped illumination and its use to offer an enhanced in-situ inspection of a technological process that is critical in Vertical-Cavity Surface-Emitting Laser (VCSEL) manufacturing, the… read more here.
Keywords: oxidation; semiconductor; spectrally shaped; shaped illumination ... See more keywords