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Published in 2021 at "Physica Scripta"
DOI: 10.1088/1402-4896/ac33f8
Abstract: In this work, an analytical model for the time-resolved dynamics of the collisional transient sheath in the plasma source ion implantation (PSII) process is developed. The presented model can forecast the temporal dependence of the…
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Keywords:
transient sheath;
sheath plasma;
time resolved;
ion ... See more keywords
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Published in 2018 at "Chinese Physics B"
DOI: 10.1088/1674-1056/27/2/025204
Abstract: The structure of the sheath in the presence of energetic particles is investigated in the multi-fluid framework. Based on the orbital motion limited (OML) theory, the dust grain charging inside the sheath of plasma containing…
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Keywords:
sheath;
sheath plasma;
dust particle;
energetic particles ... See more keywords