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Published in 2017 at "Nano letters"
DOI: 10.1021/acs.nanolett.6b03976
Abstract: Focused ion beams (FIBs) are versatile tools with cross-disciplinary applications from the physical and life sciences to archeology. Nevertheless, the nanoscale patterning precision of FIBs is often accompanied by defect formation and sample deformation. In…
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Keywords:
ion beams;
sheets ion;
folding sheets;
deformation ... See more keywords