Dealing with image shifting in 3D ToF-SIMS depth profiles.
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DOI: 10.1116/1.5041740
Abstract: The high sputter efficiency and low damage of gas cluster ion beams have enabled depth profiling to greater depths within organic samples using time-of-flight secondary ion mass spectrometry (ToF-SIMS). Due to the typically fixed geometry… read more here.
Keywords: image shifting; image; shifting tof; tof sims ... See more keywords