Investigation of the structure and properties of PVD coatings and ALD + PVD hybrid coatings deposited on sialon tool ceramics
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DOI: 10.1016/j.vacuum.2018.04.032
Abstract: Abstract It was shown in the paper that the operational properties of sialon tool ceramics coated PVD coatings, both in conventional process as well as in hybrid ALD/PVD process, depend mainly on their adhesion to… read more here.
Keywords: ald pvd; adhesion; pvd coatings; sialon tool ... See more keywords