Preparation of highly oriented β-SiC bulks by halide laser chemical vapor deposition
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DOI: 10.1016/j.jeurceramsoc.2016.09.017
Abstract: Abstract Highly oriented β-SiC bulks with high hardness were fabricated by halide laser chemical vapor deposition (HLCVD) using SiCl 4 , CH 4 and H 2 as precursors. The effects of total pressure ( P… read more here.
Keywords: sic bulks; highly oriented; laser chemical; deposition ... See more keywords