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Published in 2017 at "Ceramics International"
DOI: 10.1016/j.ceramint.2017.12.238
Abstract: Abstract Effects of oxidation cross-linking and sintering temperature on the microstructure evolution, thermal conductivity and electrical resistivity of continuous freestanding polymer-derived SiC films were investigated. The as-received films consisting of β-SiC nanocrystals embedded in amorphous…
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Keywords:
temperature;
sintering temperature;
effects oxidation;
heat ... See more keywords
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Published in 2018 at "Solar Energy Materials and Solar Cells"
DOI: 10.1016/j.solmat.2018.03.035
Abstract: Abstract p-Type hydrogenated silicon carbide (p-SiC:H) films were prepared using plasma-enhanced chemical vapor deposition by systematically incorporating carbon into nanocrystalline silicon networks. The carbon content of the films was varied by adjusting the methane/silane (CH4/SiH4;…
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Keywords:
nanocrystalline silicon;
carbon;
wide bandgap;
sic films ... See more keywords
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Published in 2017 at "Superlattices and Microstructures"
DOI: 10.1016/j.spmi.2017.04.024
Abstract: Abstract The Co-doped SiC films were developed by radio frequency-magnetron sputtering. After annealing at high temperatures, the amorphous structure of the films transformed into the structure of 3C SiC lattice and the secondary phase of…
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Keywords:
compounds cosi;
temperature;
doped sic;
structure ... See more keywords
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Published in 2017 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2017.07.016
Abstract: Abstract In this study, amorphous silicon carbonitride (SiC x N y ) films were fabricated by radio frequency (RF) chemical vapor deposition (PECVD) using a single silazane precursor and a low power density (0.15 W/cm 3…
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Keywords:
chemical vapor;
optical properties;
chemical;
spectroscopy ... See more keywords
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Published in 2019 at "RSC Advances"
DOI: 10.1039/c8ra09509d
Abstract: Morphology of 〈111〉-oriented 3C–SiC films was transformed from mosaic to whisker to cauliflower-like with the increased flow rate (f) of hexametyldisilane (HMDS) in the process of laser chemical vapor deposition (LCVD).
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Keywords:
morphology controlling;
controlling 111;
flow rate;
sic films ... See more keywords