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Published in 2020 at "Journal of Crystal Growth"
DOI: 10.1016/j.jcrysgro.2019.125359
Abstract: Abstract Epitaxial defects such as threading screw dislocation (TSD), basal plane dislocation (BPD) and so on will seriously reduce the reverse voltage or increase leakage current of power devices. We studied the classification and statistics…
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Keywords:
molten koh;
defect appearance;
epitaxial defects;
appearance sic ... See more keywords