Investigation of the damage behavior in CVD SiC irradiated with 70 keV He ions by NEXAFS, Raman and TEM
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DOI: 10.1016/j.jeurceramsoc.2016.11.046
Abstract: Abstract Chemical vapor deposited (CVD) SiC was irradiated with 70 keV He ions at room temperature. The damage behavior was investigated by near edge X-ray absorption fine structure (NEXAFS) spectroscopy, Raman spectroscopy and transmission electron microscopy… read more here.
Keywords: kev ions; irradiated kev; cvd sic; spectroscopy ... See more keywords