Femtosecond Laser Fabrication of SiC Microlens Arrays as Integrated Light Homogenizer and Splitter
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DOI: 10.1109/lpt.2023.3274353
Abstract: Silicon carbide (SiC) plays a vital role in special optics because of its stable physicochemical and excellent optical properties; however, making the fabrication of SiC considerably more difficult. In this study, femtosecond laser-assisted inductively coupled… read more here.
Keywords: femtosecond laser; sic microlens; fabrication; microlens arrays ... See more keywords