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Published in 2022 at "Materials"
DOI: 10.3390/ma15175995
Abstract: 650 V SiC planar MOSFETs with various JFET widths, JFET doping concentrations, and gate oxide thicknesses were fabricated by a commercial SiC foundry on two six-inch SiC epitaxial wafers. An orthogonal P+ layout was used…
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Keywords:
650 sic;
jfet;
gate oxide;
sic planar ... See more keywords