Fabrication of SiC Sealing Cavity Structure for All-SiC Piezoresistive Pressure Sensor Applications
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DOI: 10.3390/ma14010128
Abstract: High hardness and corrosion resistance of SiC (silicon carbide) bulk materials have always been a difficult problem in the processing of an all-SiC piezoresistive pressure sensor. In this work, we demonstrated a SiC sealing cavity… read more here.
Keywords: sic sealing; pressure sensor; sealing cavity; sic piezoresistive ... See more keywords