LAUSR

Wavelength-selective 4H-SiC UV-sensor array

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0 Published in 2019 at "Materials Science in Semiconductor Processing"

DOI: 10.1016/j.mssp.2018.10.019

Abstract: Abstract In this work, monolithically integrated wavelength-selective 4H-SiC UV-sensor arrays were manufactured using two photolithography masks and only one implantation sequence demonstrating the potential of the advanced 4H-SiC process technology for the first time. The… read more here.

Keywords: selective sic; sic sensor; wavelength; wavelength selective ... See more keywords