Microstructure and texture of polycrystalline 3C–SiC thick films characterized via EBSD
Sign Up to like & getrecommendations! Published in 2020 at "Ceramics International"
DOI: 10.1016/j.ceramint.2020.07.177
Abstract: Abstract Cubic silicon carbide (3C–SiC) is an excellent protective film on graphite and has been fabricated via laser chemical vapor deposition (LCVD) with an extremely high deposition rate by our research group. To understand comprehensively… read more here.
Keywords: polycrystalline sic; sic thick; thick films; oriented sic ... See more keywords
Characterization of morphological defects related to micropipes in 4H-SiC thick homoepitaxial layers
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Crystal Growth"
DOI: 10.1016/j.jcrysgro.2021.126182
Abstract: Abstract A new type of morphological defects related to substrate micropipe is observed in 4H-SiC thick homoepitaxial layers. The structure and formation mechanism are investigated by optical microscopy, laser microscopy, scanning electron microscopy, micro-Raman spectroscopy,… read more here.
Keywords: defects related; microscopy; spectroscopy; morphological defects ... See more keywords