Boron-doped silicon carbide (SiC) thin film on silicon (Si): a novel electrode material for supercapacitor application
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Materials Science: Materials in Electronics"
DOI: 10.1007/s10854-020-04346-y
Abstract: In this work, we report the synthesis of silicon carbide (SiC) thin film on silicon by modified chemical vapour deposition technique using boron-doped liquid polycarbosilane as a precursor. Subsequent microscopic and physical characterizations of this… read more here.
Keywords: silicon carbide; thin film; sic thin; film ... See more keywords
Enhancement of optical properties of boron-doped SiC thin film: a SiC QD effect
Sign Up to like & getrecommendations! Published in 2020 at "Bulletin of Materials Science"
DOI: 10.1007/s12034-020-02212-5
Abstract: Abstract Silicon carbide quantum dots (SiC-QD) embedded inside the SiC thin film deposited on silicon (111) wafer is directly synthesized by modified chemical vapour deposition technique using boron-doped liquid polycarbosilane as a precursor. Subsequent microscopic… read more here.
Keywords: enhancement optical; boron doped; optical properties; thin film ... See more keywords
Influence of SiC thin films thickness on the electrical properties of Pd/SiC thin films for hydrogen gas sensor
Sign Up to like & getrecommendations! Published in 2020 at "Vacuum"
DOI: 10.1016/j.vacuum.2020.109750
Abstract: Abstract In this work, the effect of thickness of SiC thin film on hydrogen sensing property of Pd/SiC (Pd-capped SiC) thin films has been investigated. Pd/SiC thin films have been grown on Si (100) substrate… read more here.
Keywords: hydrogen gas; sensor; sic thin; thin films ... See more keywords
Hybrid piezoelectricity enabled flexible AZO/SiC thin films sensor with high output voltage and broad temperature range
Sign Up to like & getrecommendations! Published in 2025 at "Journal of Materials Chemistry C"
DOI: 10.1039/d5tc00445d
Abstract: There is an increasing attention on flexible sensors that can monitor pressure at high temperatures for emerging applications such as robotics, aerospace equipment and health monitoring. However, current flexible pressures... read more here.
Keywords: flexible azo; sic thin; azo sic; enabled flexible ... See more keywords
Tunable thermal conductivity of surface phonon polaritons in SiC thin film
Sign Up to like & getrecommendations! Published in 2024 at "Physica Scripta"
DOI: 10.1088/1402-4896/ad74aa
Abstract: As an additional heat carrier besides phonons and electrons, the surface phonon polariton (SPhPs) possesses a large potential to increase the thermal conductivity. In this work, the influences of SPhP frequency, film thickness and film… read more here.
Keywords: sic thin; conductivity; permittivity; thermal conductivity ... See more keywords
Polycrystalline LPCVD 3C-SiC Thin Films on SiO₂ Using Alternating Supply Deposition
Sign Up to like & getrecommendations! Published in 2024 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2024.3472286
Abstract: In this paper, we demonstrate the deposition of 3C-SiC thin films on SiO2 using the alternating supply deposition (ASD) technique in a low-pressure chemical vapor deposition (LPCVD) furnace. We provide data of the thin film… read more here.
Keywords: sic thin; supply deposition; thin films; using alternating ... See more keywords
Room Temperature Deposition of Nanocrystalline SiC Thin Films by DCMS/HiPIMS Co-Sputtering Technique
Sign Up to like & getrecommendations! Published in 2022 at "Nanomaterials"
DOI: 10.3390/nano12030512
Abstract: Due to an attractive combination of chemical and physical properties, silicon carbide (SiC) thin films are excellent candidates for coatings to be used in harsh environment applications or as protective coatings in heat exchanger applications.… read more here.
Keywords: sic thin; nanocrystalline sic; spectroscopy; microscopy ... See more keywords