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Published in 2022 at "ChemSusChem"
DOI: 10.1002/cssc.202201953
Abstract: Trichlorosilane is the key intermediate for the large-scale production of polycrystalline silicon in the Siemens and Union Carbide processes. Both processes, however, are highly inefficient, and over two thirds of the trichlorosilane employed is converted…
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Keywords:
reloaded chloride;
sicl4 hsicl3;
chloride assisted;
siemens reloaded ... See more keywords
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Published in 2021 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2020.148777
Abstract: Abstract It is essential to convert SiCl4 into SiHCl3 over effective catalysts so as to construct a close-cycle sustainable polysilicon production process. However, the dissociation mechanism of SiCl4 is elusive yet. Here we adopted density…
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Keywords:
dft;
dissociation;
bond defect;
sicl4 ... See more keywords
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Published in 2019 at "Journal of Environmental Chemical Engineering"
DOI: 10.1016/j.jece.2019.103120
Abstract: Abstract The aim of this study was to enhance the hydrophobicity of cotton cloth using silicon tetrachloride (SiCl4) combined with water-repellent agents 1H,1H,2H,2H-perfluorooctyltriethoxysilane (POTS), dimethyldichlorosilane (DMDCS), and stearic acid (SA) for cooking oil and motor…
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Keywords:
water repellent;
sicl4;
cotton;
cotton cloth ... See more keywords
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Published in 2024 at "Semiconductor Science and Technology"
DOI: 10.1088/1361-6641/ad8303
Abstract: Plasma etching steps are critical for metal–oxide–semiconductor channel high electron mobility transistors gate fabrication as they can deteriorate electrical performances due to gallium nitride degradation. Adding SiCl4 to a low bias Cl2 plasma in presence…
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Keywords:
damaging plasma;
plasma;
sicl4;
low damaging ... See more keywords