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Published in 2021 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2020.148777
Abstract: Abstract It is essential to convert SiCl4 into SiHCl3 over effective catalysts so as to construct a close-cycle sustainable polysilicon production process. However, the dissociation mechanism of SiCl4 is elusive yet. Here we adopted density…
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Keywords:
dft;
dissociation;
bond defect;
sicl4 ... See more keywords