Siemens Reloaded: Chloride-Assisted Selective Hydrodechlorination of SiCl4 to HSiCl3.
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DOI: 10.1002/cssc.202201953
Abstract: Trichlorosilane is the key intermediate for the large-scale production of polycrystalline silicon in the Siemens and Union Carbide processes. Both processes, however, are highly inefficient, and over two thirds of the trichlorosilane employed is converted… read more here.
Keywords: reloaded chloride; sicl4 hsicl3; chloride assisted; siemens reloaded ... See more keywords