A DoE–TOPSIS meta-model for parametric optimization of silicon carbonitride (SiCN) thin film deposition process
Sign Up to like & getrecommendations! Published in 2019 at "Journal of the Brazilian Society of Mechanical Sciences and Engineering"
DOI: 10.1007/s40430-019-1796-6
Abstract: Silicon carbonitride (SiCN) thin films were deposited on p-type Si(100) substrate by thermal chemical vapour deposition process using SiC and Si3N4 nanopowder as the source, and mixture of N2 and H2 as precursor gases. For… read more here.
Keywords: deposition; topsis; sicn thin; deposition process ... See more keywords
A SiCN Thin Film Thermistor Based on DVB Modified Polymer-Derived Ceramics
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13091463
Abstract: Carbon-rich SiCN ceramics were prepared by divinylbenzene (DVB)-modified polysilazane (PSN2), and a high-conductivity SiCN thin film sensor suitable for medium-low temperature sensing was fabricated. The modified liquid precursors were patterned by direct ink writing to… read more here.
Keywords: sicn ceramics; dvb modified; conductivity; sicn thin ... See more keywords