Predicting plastic and fracture properties of silicon oxycarbide thin films using extended finite element method
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DOI: 10.1016/j.jallcom.2019.04.065
Abstract: Abstract The mechanical reliability of SiCO thin films is a key factor for its applications, however, the fracture properties of SiCO films systems have not yet been sufficiently explored. In this work, the plastic behavior… read more here.
Keywords: thin films; extended finite; sico films; fracture properties ... See more keywords