Articles with "side releasing" as a keyword



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Front-side releasing oriented clamped–clamped beams for piezoresistive sensors

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Published in 2023 at "Journal of Micromechanics and Microengineering"

DOI: 10.1088/1361-6439/acd126

Abstract: Front-side releasing suspended structures made using bulk micromachining processes have the advantages of simplifying vacuum or hermetic packaging processes and reducing squeeze-film damping. This paper studies the effect of doping concentration on the etching rate… read more here.

Keywords: clamped beams; front side; clamped clamped; 110 oriented ... See more keywords