Experimental investigation on the ultrasonically assisted single-sided lapping of monocrystalline SiC substrate
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Manufacturing Processes"
DOI: 10.1016/j.jmapro.2019.06.008
Abstract: Abstract This paper studied the effect and optimization of ultrasonically assisted single-sided lapping for monocrystalline SiC wafer using grey relational analysis method. 27 experiments based on the Taguchi method of orthogonal arrays were performed to… read more here.
Keywords: monocrystalline sic; ultrasonically assisted; sided lapping; single sided ... See more keywords
Edge roll-off suppression method in double-sided lapping with fixed abrasives.
Sign Up to like & getrecommendations! Published in 2022 at "Applied optics"
DOI: 10.1364/ao.446652
Abstract: Edge roll-off affects the performance of key parts in precision optics processing. Currently, the evolution mechanism of edge roll-off is not understood clearly, and the existing suppression methods for edge roll-off are not qualified in… read more here.
Keywords: roll; suppression; double sided; sided lapping ... See more keywords