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Published in 2020 at "Journal of Applied Physics"
DOI: 10.1063/5.0026124
Abstract: The complex optical constants and the subsurface damage layer of uniaxial doped 6H-SiC wafers are measured using Mueller matrix spectroscopic ellipsometry. A comparison is made between measurements on a single-sided polished wafer that can be…
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Keywords:
single sided;
ellipsometry;
subsurface damage;
damage layer ... See more keywords
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Published in 2022 at "Applied optics"
DOI: 10.1364/ao.474495
Abstract: The temperature of the environment directly affects the accuracy of refractive index (RI) measurement. Therefore, we propose a double-sided polished surface plasmon resonance (SPR) RI fiber sensor, which is available for simultaneous measurement of the…
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Keywords:
refractive index;
temperature;
sided polished;
double sided ... See more keywords